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LIBRA Filter Element

  • LIBRA series cartridge is an advanced hydrophilic PTFE filter element, made of high-purity materials and washed with ultrapure water. It is specially designed to purify electronic chemicals for wafer cleaning, such as the critical water-based Cleaning agents SC-1, SC-2 and SPM etc.


    Product Features:

    • High-purity PTFE

    • Suitable for high temperature and high pressure environ­ment

    • High flow, low D.P.

    • Manufactured in a dust-free environment

    • 100% Integrity Test

LIBRA Filter Element
  • LIBRA Filter Element

Product Parameters

  • Maximum operating temperature:

    170°C / 338°F

    Maximum forward differential pressure:

    0.44 MPa(4.4 bar,64 psi) @ 25 °C(77 °F)

    0.05 MPa(0.5 bar,7.5 psi) @ 180 °C(356 °F)

    Maximum reverse differential pressure:

    0.34 MPa(3.4bar,50 psi) @ 25 °C(77 °F)

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