LIBRA Filter Element

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LIBRA series cartridge is an advanced hydrophilic PTFE filter element, made of high-purity materials and washed with ultrapure water. It is specially designed to purify electronic chemicals for wafer cleaning, such as the critical water-based Cleaning agents SC-1, SC-2 and SPM etc.

Product Features:

• High-purity PTFE

• Suitable for high temperature and high pressure environment

• High flow, low D.P.

• Manufactured in a dust-free environment

• 100% Integrity Test

Product Parameters

Maximum operating temperature:

170°C / 338°F

Maximum forward differential pressure:

0.44 MPa(4.4 bar,64 psi) @ 25 °C(77 °F)

0.05 MPa(0.5 bar,7.5 psi) @ 180 °C(356 °F)

Maximum reverse differential pressure:

0.34 MPa(3.4bar,50 psi) @ 25 °C(77 °F)

Typical Applications

Wafer Cleaning & Filtration

Semiconductor Filtration

Ultrapure Water Purification

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