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Ultrapure Gas Filter GIST mini
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GIST mini ultra-pure gas filter is specially designed for electronic-grade gas, and filtration accuracy can reach 1.5 nm. The device is compact, excellent strength and compatible for most of semiconductor process gases. lt is suitable for bulk gases and inert gases.
Produce Features
• 316L electronic grade hardware
• High throughput and low pressure drop
• Excellent chemical compatibility
• Suitable for high temperature and high pressure environment
• 100% integrity tested
• 100% helium leak tested
• Manufactured in a dust-free environment
Technical Parameter
- Membrane: PTFE
- Cage and End cap: PFA
- O-ring: FFKM
- Shell: Solution I: Low sulfur SS316L; Solution II: SS 316L(VAR/VIM+VAR)
- Surface Treatment: Outer surface: Ra<1.6μm; Inner surface: Ra<0.2μm
- Filtration Rating: ≥1.5nm
- Filtration Efficiency: ≥99.9999999% (9 LRV)@30 slpm
- Particle shedding: Particle release: <1 particle/ft³ @>0.01μm; Volatiles: <10 ppb moisture
- Helium Leak Test: Qualified: 2×10⁻¹⁰ atm.cc/sec; Tested: 1×10⁹ atm.cc/sec
- Max. inlet pressure: 207bar@23℃
- Max. Forward D.P.: 4bar@23℃
- Max. Reverse D.P.: 0.7bar@23℃
- Max. operating Temp.: 180℃
- Flow rate: 1.0: 0~120slpm; 1.5: 0~300slpm
Product Parameters
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Maximum inlet pressure:207 Bar@23℃
Maximum differential pressure:
Forward: 4 bar (60 psid) @ 23°C (73 °F)
反向: 0.07 MPa (0.7 bar, 10 psid) @ 23°C (73℉)
Maximum operating temperature:120 ℃ (248 ℉)
Gas flow rate:
Recommended working flow rate: 0-60slpm
Typical Applications
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Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai