Gasfil High-temp Ultrapure Gas Filter

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Gasfil series ultra-pure gas filter, adopting all 316L stainless steel structure, is specially designed for the in-line filtration application of ultra-high-purity gas in semiconductor manufacturing process, and the filtration accuracy can reach 1.5 nm. It is ideal for high temperature and dynamic high pressure applications.

Product Features

• All 316L SS construction

• Ultra-high particle interception efficiency, high flux, low resistance

• Suitable for high temperature applications

• Compact structure

• Suitable for a variety of process gases

• Manufactured in a dust-free environment

• 100% integrity tested

• 100% helium leak tested

Product Parameters

Maximum intake pressure:52 bar@23℃
Maximum operating differential pressure:
5.2bar（75psid）
Maximum operating temperature:
Inert gas: 400 ℃
Corrosive gas, reaction gas: 50 ℃
Recommended working flow:
Φ20 series: 0-15slpm
Φ33 Series: 0-50slpm
Φ75 series: 0-100slpm

Typical Applications

Ultrapure Gas Filtration

TFT LCD Manufacturing Process

Semiconductor Filtration

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