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High-temp Ultrapure Gas Filter Gasfil
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Gasfil series ultra-pure gas filter, adopting all 316L stainless steel structure, is specially designed for the in-line filtration application of ultra-high-purity gas in semiconductor manufacturing process, and the filtration accuracy can reach 1.5 nm. It is ideal for high temperature and dynamic high pressure applications.
Product Features
• All 316L SS construction
• Ultra-high particle interception efficiency, high flux, low resistance
• Suitable for high temperature applications
• Compact structure
• Suitable for a variety of process gases
• Manufactured in a dust-free environment
• 100% integrity tested
• 100% helium leak tested
Technical Parameter
- Membrance: SS 316L powder sintered filter、Sintered Nickel Powder
- Shell: Low sulfur SS 316L
- Surface Treatment: Outer surface: Ra<1.6um; Inner surface: Ra<0.2um
- Filtration Rating: ≥1.5nm
- Filtration Efficiency: ≥99.9999999%(9 LRV)@30 slpm
- Max. inlet pressure: 207 bar
- Max. Operating D.P.: 5.2 bar
- Max. operating temp.: inert gas: 460℃; Corrosive gas, reactive gas: 50℃
- Particle shedding: <1 particle/ft³ @>0.01 μm, 30slpm
- Helium Leak Test: Qualified: 2×10⁻¹⁰ atm.cc/sec; Tested: 1×10⁹ atm.cc/sec
- Recommended Flow rate: φ20：0~15slpm; φ33：0~50slpm; φ75：0~100slpm
Product Parameters
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Maximum intake pressure:52 bar@23℃
Maximum operating differential pressure:
5.2bar（75psid）
Maximum operating temperature:
Inert gas: 400 ℃
Corrosive gas, reaction gas: 50 ℃
Recommended working flow:
Φ20 series: 0-15slpm
Φ33 Series: 0-50slpm
Φ75 series: 0-100slpm
Typical Applications
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Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai