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Gasfil High-temp Ultrapure Gas Filter

  • Gasfil series ultra-pure gas filter, adopting all 316L stainless steel structure, is specially designed for the in-line filtration application of ultra-high-purity gas in semiconductor manufacturing process, and the filtration accuracy can reach 0.003μm. It is ideal for high temperature and dynamic high pressure applications.


    Product Features

    • All 316L SS construction

    • Ultra-high particle interception efficiency, high flux, low resistance

    • Suitable for high temperature applications

    • Compact structure

    • Suitable for a variety of process gases

    • Manufactured in a dust-free environment

    • 100% integrity tested

    • 100% helium leak tested

Gasfil High-temp Ultrapure Gas Filter
  • Gasfil High-temp Ultrapure Gas Filter

Product Parameters

  • Maximum intake pressure:52 bar@23℃
    Maximum operating differential pressure:
    Maximum operating temperature:
    Inert gas: 400 ℃
    Corrosive gas, reaction gas: 50 ℃
    Recommended working flow:
    Φ20 series: 0-15slpm
    Φ33 Series: 0-50slpm
    Φ75 series: 0-100slpm

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