MEGAPOLY PFA Filter

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MEGAPOLY PFA filter adopts a compact design and is made of PFA Membrane, which provides excellent mechanical characteristics and chemical resistance without using any metal components. It's suitable for microelectronic semiconductor process, strong acid, strong alkali and other wet electronic chemicals filtration.

Product Features

• Compact design, low installation space requirements

• Low liquid storage, low material waste

• No metal components

• Wide range of chemical compatibility

• Locking ring secures cartridge

• Extremely low metal ion precipitation

• Cleaned and packaged in a clean room

Product Parameters

Maximum working pressure:
0.3MPa(3.0bar, 43psi)@100°C(212°F)
0.76MPa(7.6bar, 110psi)@25°C(77°F)
Maximum use temperature:
100°C (212°F)

Typical Applications

Ultrapure Gas Filtration

Semiconductor Filtration

Wafer Cleaning & Filtration

TFT LCD Manufacturing Process

Ultrapure Water Purification

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