GIST Mega Ultrapure Gas Filter

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GIST Mega in-line ultra-pure gas filter is specially designed for high-flow electronic grade gas, and filtration accuracy can reach 3nm. The device is compact, excellent strength and compatible for most of semiconductor process gases. lt is suitable for bulk gases and inert gases.

Product Features

• 316L electronic grade hardware

• High throughput and low pressure drop

• Excellent chemical compatibility

• Suitable for high temperature and high pressure environment

• 100% integrity tested

• 100% helium leak tested

• Manufactured in a dust-free environment

Product Parameters

Maximum inlet pressure:12bar(174 psig)@ 23℃(73℉)

Maximum forward differential pressure:4.1bar(59 PSID) @ 23℃(73℉)

Maximum reverse differential pressure:0.07mpa (0.7 bar, 10 PSID) @ 23℃(73℉)

Maximum operating temperature:60℃(140 ℉)

Gas flow rate (operating flow range):

N: 0-1500slpm

L: 0-3000slpm

Typical Applications

Ultrapure Gas Filtration

Semiconductor Filtration

Wafer Cleaning & Filtration

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