Lunaris CMP Filter

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Lunaris applies a more scientifically optimized filter media composition that effectively captures large particles while maintaining the original particle size distribution of the slurry.

Product Features

• Higher filtration efficiency and longer filter life

• Diversified filter element combinations

• Easy to assemble and disassemble, saving time

Typical Application

• Semiconductor slurry filtration

Product Parameters

Maximum inlet pressure:207 Bar@23℃
Maximum differential pressure:
Forward: 4 bar (60 psid) @ 23°C (73 °F)
反向: 0.07 MPa (0.7 bar, 10 psid) @ 23°C (73℉)
Maximum operating temperature:120 ℃ (248 ℉)
Gas flow rate:
Recommended working flow rate: 0-60slpm

Typical Applications

Infusion Fluid Filtration

Vaccine Filtration

Blood Product Filtration

Related components

Related Equipment

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