NANO Capsule Filter

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The NANO is an easy-to-use and cost-effective capsule filter designed for relatively low flow rates. The filter material and connection can be flexibly selected, and are widely used in the microelectronics industry. A variety of membrane and housing solutions are suitable for different process conditions.

Product Features

• Compact design with small installation space

• Easy filter replacement

• Lower liquid storage, less material waste

• No metal components

• Good chemical compatibility

• Manufactured in a dust-free environment

Product Parameters

	PT	PP	PF		HT
Filter Media	Teflon	Polypropylene	Hydrophilic asymmetric polyethersulfone	Teflon
Other Components	Polypropylene	Polypropylene	Polypropylene		HDPE
Filtration grade	0.02μm, 0.05μm,0.μm 0.2um,0.5μm,1.0μm 5.0μm, 10μm	0.2μm,0.5μm,μm 5 μm, 10 μm, 25 μm	0.05μm,0.lμm 0.2μm,0.5μm,1.0μm 5μm, 10μm		0.02μm, 0.05μm,0.μm 0.2μm,0.5μm,1.0μm, 5.0μm, 10μm
Maximum operating temperature	90°C/194 °F	90°C/194 °F	90°C/194 °F	90°C/194 °F
Maximum operating pressure	5.5bar@50℃	4.8bar@21℃	4.8bar@21℃	5.5bar@50℃
Main application	Exhaust gas/process gas/organic solvent	Acid, alkali, deionized water, solvent	Deionized water/acid, alkali	Photoresist/deionized water/acid, alkali

Typical Applications

Wafer Cleaning & Filtration

TFT LCD Manufacturing Process

Ultrapure Water Purification

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