Electronic Filter
Endless Exploration, Boundless Opportunities
GIST Ultrapure Gas Filter
-
GIST ultra-pure gas filter is specially developed and designed for the purification of electronic-grade ultra-pure gas, filtration precision can be 1.5 nm. The equipment has compact structure and high strength, it is also suitable for filtering various high temperature and high pressure gas.
Product Features:
• SS316L electronic grade polished housing
• High flux and low pressure loss
• Excellent chemical compatibility
• High temperature and high pressure
• 100% Integrity Test
• 100% Helium gas leak test
• Clean room manufacturing and packaging
Product Parameters
-
Maximum operating pressure:
52 Bar@80°C
Maximum allowable pressure drop:
Forward: 7 bar / 21°C
Reverse: 3.4 bar / 21°C
Maximum operating temperature:
Pp: 80 °c/PFA: 180 °c
Gas flow rate:
Recommended operating flow rate: 0-300slpm
Typical Applications
Related components
Related Equipment
Message consultation
Contact
Hotline: (65) 6376 3610
Email:sales@feature-tec.com.sg
Address: No.9, Kaki Bukit Road 1, #02-09, Eunos Technolink, Singapore 415938