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Ultrapure Gas Filter GIST
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GIST ultra-pure gas filter is specially developed and designed for the purification of electronic-grade ultra-pure gas, filtration precision can be 1.5 nm. The equipment has compact structure and high strength, it is also suitable for filtering various high temperature and high pressure gas.
Product Features:
• SS316L electronic grade polished housing
• High flux and low pressure loss
• Excellent chemical compatibility
• High temperature and high pressure
• 100% Integrity Test
• 100% Helium gas leak test
• Clean room manufacturing and packaging
Technical Parameter
- Shell: Low sulfur SS 316L
- Membrane: PTFE
- O-ring: FFKM
- Cage and End cap: PFA
- Membrane Area: PFA: >230cm²; PP: >400cm²
- Max. operating pressure: 52 bar@80℃(Optional 207 Bar @25℃)
- Max. Operating D.P.: Forward: 7 bar@21℃; Reverse: 3.4 bar@21℃
- Max. Operating Temperature: PP: 80℃; PFA: 180℃
- Flow rate: 0~600slpm
- Particle shedding: Particle release: <1 particle/ft³ @>0.01μm; Volatiles: <10 ppb moisture
Product Parameters
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Maximum operating pressure:
52 Bar@80°C
Maximum allowable pressure drop:
Forward: 7 bar / 21°C
Reverse: 3.4 bar / 21°C
Maximum operating temperature:
Pp: 80 °c/PFA: 180 °c
Gas flow rate:
Recommended operating flow rate: 0-300slpm
Typical Applications
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Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai