Electronic Filter
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GIST Ultrapure Gas Filter
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GIST ultra-pure gas filter is specially developed and designed for the purification of electronic-grade ultra-pure gas, filtration precision can be 3nm. The equipment has compact structure and high strength, it is also suitable for filtering various high temperature and high pressure gas.
Product Features:
• SS316L electronic grade polished housing
• High flux and low pressure loss
• Excellent chemical compatibility
• High temperature and high pressure
• 100% Integrity Test
• 100% Helium gas leak test
• Clean room manufacturing and packaging
Product Parameters
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Maximum operating pressure:
52 Bar@80°C
Maximum allowable pressure drop:
Forward: 7 bar / 21°C
Reverse: 3.4 bar / 21°C
Maximum operating temperature:
Pp: 80 °c/PFA: 180 °c
Gas flow rate:
Recommended operating flow rate: 0-300slpm
Typical Applications
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Contact
Hotline: (65) 6376 3610
Email:sales@feature-tec.com.sg
Address: No.9, Kaki Bukit Road 1, #02-09, Eunos Technolink, Singapore 415938