Filtration & Separation Solutions

Embrace Ultimate Application Challenges of Filtration, Separation, and Purification Technology

Semiconductor Filtration

I. Filtration of ultra-pure gases in semiconductor plants

 

Electronic gases are extensively used in various processes within the semiconductor industry. As semiconductor wafer sizes continue to shrink, the purity of electronic gases becomes increasingly crucial. Even the slightest impurities can have a detrimental impact on semiconductor yields.

 

A semiconductor plant typically employs around 50 types of electronic gases, which can be categorized as bulk gases (such as N, O, Ar) and special gases (including inert gases, combustion gases, and corrosive gases).

 

Currently, semiconductor factories require bulk gases to have a purity level of 3N (99.9%), while special gases need to meet purity requirements of 5N-6N (99.999%-99.9999%). The factory service system relies on gas filtration equipment to efficiently eliminate contaminants and guarantee that the gases meet the highest purity standards.

Feature-Tec Product

 

Mighty-G Series Filter Cartridge

The Mighty-G series cartridge utilizes ultra-high density folding technology to provide an ultra-high filtration area with excellent compatibility and low precipitation levels. Its unique hydrophobic material ensures high throughput, low pressure loss, and a prolonged service life. With a precision level up to 0.003 μm, the Mighty-G cartridge meets higher filtration requirements. It is suitable for high-temperature and corrosive gas working conditions.

 

EG Series Filter Element

The EG series filter element is made of hydrophobic PTFE microporous membrane material, offering ultra-high filtration precision, low differential pressure, high flow rate, and a long service life. The EG series ultrapure gas filter element is ideal for bulk gas filtration.

 

 

II. Ultrapure Chemical Filtration in Semiconductor Factories

In the semiconductor manufacturing process, cleaning and wafer surface treatment account for up to 20% of the process steps. This involves the use of various wet electronic chemicals.

According to the SEMI standard grade table for wet electronic chemicals, the purity requirements for high-grade wet electronic chemicals have reached the ppt level. Therefore, the semiconductor factory system must undergo necessary filtration treatment for these ultra-pure chemicals before they can be introduced into the formal process.

Feature-Tec Product

 

Mighty Series Filter

The Mighty series filter utilizes an advanced perfluorine structure, offering excellent chemical compatibility and very low precipitation levels. It is suitable for the filtration and purification of critical wet electronic chemicals, such as strong acids. The Mighty-G series filter has high retention efficiency and unique folding technology, ensuring high throughput, low resistance, and an extended service life.

 

Libra Series Filter Element

The Libra series filter element adopts an advanced perfluorinated structure with excellent chemical compatibility and low precipitation levels. It is suitable for the filtration and purification of critical wet electronic chemicals, such as aqueous cleaning agents SC-1, SC-2, and SPM. The Libra series filter element uses a modified PTFE membrane that does not require pre-wetting, saving startup time and reducing operational costs.

 

 

III.  Ultrapure Water Filtration in Semiconductor Plants

The semiconductor manufacturing process relies on ultrapure water for cooling circulating water and process point water. The filtration of cooling circulating water in semiconductor plants demands a continuous and reliable supply, as well as high filtration stability.

 

For point-of-use ultrapure water, which is essential for semiconductor production, stringent requirements must be met. In addition to temperature, resistivity, particulate matter, and dissolved oxygen, the water must have strict controls on the content of silica, boron, and other elements. These elements can easily react with the semiconductor wafers, leading to decreased product yields.

 

Feature-Tec provides JUMBO cartridges for high-flow filtration, ensuring pure water in semiconductor factory systems. These large-size, single-opening folded cartridges adopt inside-to-outside bag filtration flow direction and unique folding processes. With high dirt-holding capacity and absolute filtration precision >98%, they are suitable for high-flow filtration.

 

PEASIC cartridges, made of high-purity PP material and asymmetric polyethersulfone membrane, offer high flux, low metal ion precipitation, and good hydrophilicity. They are suitable for ultra-high purity deionized water applications. The finished products are cleaned by high-purity water to avoid the effects of particles, TOC, and metal ion precipitation during installation and use.

 

 

IV. Air Filtration in Semiconductor Plants

In semiconductor production workshops, dust, particles, and other pollutants not only directly affect the qualification rate of finished products but can also cause circuit breakage, short circuits, and even fire hazards when they adhere to integrated circuits. Therefore, the semiconductor production process must take place in strictly controlled environmental conditions within clean rooms. The plant system is responsible for ensuring the cleanliness of the clean rooms.

 

 

In chip factories, the traditional method of ventilation involves using high-efficiency air filters on the entire ceiling of the workshop and the whole floor as a return air grille. However, nowadays, some chip factories have started using filtering devices with their own fans, known as FFUs.

 

The FFU circulation system offers not only cleanliness security but also space-saving benefits and high operational flexibility. It allows for system upgrades and adjustments without affecting production. Additionally, the FFU circulation system has lower operating costs. Therefore, in semiconductor manufacturing, the FFU cycle system has become the preferred engineering design scheme for dust-free workshops. When using FFU, double-sided sealing strips without partition filters are often used to enhance its efficiency and performance.

 

Feature-Tec Product:

 

MP Non-partition filter

MP Non-partition filter are extensively utilized in clean engineering and equipment end air supply devices, including laminar flow hoods, air supply outlets, and FFUs. These filters have excellent sealing properties and effectively control air leakage with FFUs. They have a large filtering area, low resistance, high efficiency, large dust capacity, long service life, and low operation cost.

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