VIGOROSO Integrated Perfluorinated Filter

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The PTFE filtration solution is specially designed for advanced Wet Etch Cleaning (WEC) processes. It ensures excellent cleanliness while effectively removing particles from various acids, bases, and other process chemicals, featuring broad chemical compatibility and high throughput.

Product Features

• Multiple area options, high flow rate, long service life

• Excellent chemical compatibility

• 100% integrity tested

• High filtration efficiency, effectively removes particles from wet chemicals

• Additive-free welding, utilizing perfluorinated material thermal bonding technology

• Pre-wetted filters, enabling quick start in water-based chemicals

• Manufactured in a cleanroom environment

• High initial cleanliness, low particle shedding, and reduced metal ion leaching

Typical Application

• Semiconductor wet etch and cleaning

• High-purity chemical production, filling, and transportation

VIGOROSO Integrated Perfluorinated Filter

Product Parameters

Maximum inlet pressure:207 Bar@23℃
Maximum differential pressure:
Forward: 4 bar (60 psid) @ 23°C (73 °F)
反向: 0.07 MPa (0.7 bar, 10 psid) @ 23°C (73℉)
Maximum operating temperature:120 ℃ (248 ℉)
Gas flow rate:
Recommended working flow rate: 0-60slpm

Typical Applications

TFT LCD Manufacturing Process

Wafer Cleaning & Filtration

Semiconductor Filtration

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