Semiconductor
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Gasfil Sintub High-temp ultrapure gas Filter
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Gasfil sintub series ultrapure gas filter adopt all 316L stainless steel structure,,filtration rating can reach 1.5 nm. It is specially designed for the in-line filtration application of ultra-high-purity gas insemiconductor manufacturing process with metal construction of various models and with 0 to 250 L/min flow rates. It's the ideal filtration solution of high-temperature, dynamic, high-pressure applications.
Product Features
• All 316L stainless steel construction
• Ultra-high particle interception efficiency, high flux, low resistance
• Suitable for high temperature applications
• Compact construction
• Suitable for a wide range of process gases
• Manufactured, tested and packaged in a clean room environment
• 100% integrity test passed
• 100% helium leakage test passed
Product Parameters
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Maximum inlet pressure:207 Bar@23℃
Maximum differential pressure:
Forward: 4 bar (60 psid) @ 23°C (73 °F)
反向: 0.07 MPa (0.7 bar, 10 psid) @ 23°C (73℉)
Maximum operating temperature:120 ℃ (248 ℉)
Gas flow rate:
Recommended working flow rate: 0-60slpm
Typical Applications
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Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai
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