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Gasfil Sintub High-temp ultrapure gas Filter

  • Gasfil sintub series ultrapure gas filter adopt all 316L stainless steel structure,,filtration rating can reach 1.5 nm. It is specially designed for the in-line filtration application of ultra-high-purity gas insemiconductor manufacturing process with metal construction of various models and with 0 to 250 L/min flow rates. It's the ideal filtration solution of high-temperature, dynamic, high-pressure applications.

     

    Product Features

    •  All 316L stainless steel construction

    •  Ultra-high particle interception efficiency, high flux, low resistance

    •  Suitable for high temperature applications

    •  Compact construction

    •  Suitable for a wide range of process gases

    •  Manufactured, tested and packaged in a clean room environment

    •  100% integrity test passed

    •  100% helium leakage test passed

Gasfil Sintub High-temp ultrapure gas Filter
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  • Gasfil Sintub High-temp ultrapure gas Filter

Product Parameters

  • Maximum inlet pressure:207 Bar@23℃
    Maximum differential pressure:
    Forward: 4 bar (60 psid) @ 23°C (73 °F)
    反向: 0.07 MPa (0.7 bar, 10 psid) @ 23°C (73℉)
    Maximum operating temperature:120 ℃ (248 ℉)
    Gas flow rate:
    Recommended working flow rate: 0-60slpm

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