Filtration & Separation Solutions

Embrace Ultimate Application Challenges of Filtration, Separation, and Purification Technology

Ultrapure Gas Filtration

Ultrapure Gas is an important basic raw material for semiconductor manufacturing industry, widely used in thin film deposition, etching, doping, passivation, cleaning and other processes. From wafer processing to the final device packaging, almost every step is inseparable from the electronic gas, so it is the key factor in the semiconductor manufacturing.

Ensuring the quality of electronic gases is crucial in semiconductor manufacturing. If the purity of gases does not meet the standard, it can lead to the failure of downstream products or contamination of the entire production line, resulting in the complete loss of the product. With approximately 450 processes involved in semiconductor production and the use of over 50 different gases, these gases can be categorized into bulk gas and specialty gases.

 

1. Bulk gases

Relatively simple gases are supplied by gas suppliers. They are stored in large storage tanks outside the wafer manufacturing plant and are often divided into inert gases (Ar, He), reducing gases (H₂), and oxidizing gases (O₂).

 

2. Specialty gases

Specialty gases are essential materials in semiconductor manufacturing, but they are supplied in smaller quantities compared to bulk gases. However, specialty gases pose more risks as they are often hazardous. For instance, gases like HCl and Cl₂ are corrosive, silane can spontaneously combust, arsenic and phosphine are toxic, and WF₆ is highly reactive.

In general, semiconductor manufacturing requires a purity level of 3N for bulk gases, meaning 99.9% purity, and a higher purity level of 5N-6N for specialty gases, indicating 99.9999% purity. Additionally, metallic elements need to be purified to levels ranging from 10-⁹ grade to 10 -¹² grade.

It is important to prevent the entry of "micro" contaminants into the production process, which are extremely small in size. Consequently, it is necessary to install gas filters before utilizing these gases to eliminate particles that may be dislodged by vibrations or impacts in the gas supply system.

 

Feature-Tec Solutions

 

Gist Ultrapure Gas Filter

Gist UltraPure Gas Filter Cartridge is specially designed for the purification of electronic gases, the micron rate can reach 3nm, and the harmful impurities can be controlled at 10-9

 

Mighty-G Series Filter Cartridge

Mighty-G series filter cartridge adopts ultra-high-density folding technology to provide an ultra-high filtration area. The unique hydrophobic material ensures high throughput, low pressure loss, and prolonged service life. The micron rate can reach 0.003 μm, meeting even the highest requirements.

 

EG Series

EG filter cartridges are made of hydrophobic PTFE microporous membrane, ideal for gas filtration, tank top breathing filtration, and so on.

 

Related components

GIST Ultrapure Gas Filter


GIST Ultrapure Gas Filter

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Mighty-G series Gas Filter Element


Mighty-G series Gas Filter Element

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EG Ultra Pure Gas Filter


EG Ultra Pure Gas Filter

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