Filtration & Separation Solutions

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Hydrogen Peroxide

The production of hydrogen peroxide is mainly based on the anthraquinone process both domestically and internationally. Abroad, the fluidized bed hydrogenation process is predominantly used, while domestically, the fixed bed hydrogenation process is more common. In recent years, there has been a gradual increase in the adoption of fluidized bed technology in newly built domestic plants. In the entire production process, hydrogenation filtration of the hydrogenation solution and filtration of the working fluid in the post-treatment process are crucial, as they directly affect the stable operation of the plant. The former is related to safety, while the latter directly impacts the lifespan of the catalyst.

Feature-Tec, through years of practice, has developed a mature technology filtration solution for the production of hydrogen peroxide using the anthraquinone process. This solution has been used in hydrogen peroxide plants domestically and internationally for many years, receiving recognition from numerous users.

 

 

Feature-Tec  Solution

• Primary Filtration of Hydrogenation Solution: Feature-Tec Selfclear Rapid-Cleaning Filtration System

• Primary Filtration of Catalyst: Feature-Tec Selfclear Rapid-Cleaning Filtration System, arranged radially around the fluidized bed reactor, operated in multiple groups to ensure continuous and stable production of the entire system.

 

 

 

• Secondary and Tertiary (Safety) Filtration: Feature-Tec Rocket Series & Jumbo Series, EL Series & CW Series products

 

 

 

Feature-Tec's Fixed Bed Process Filtration Solution

Compared to the fluidized bed process, this filtration process employs two stages of filtration with different gradients/precisions to ensure that the palladium catalyst powder flows to the downstream process after hydrogenation, preventing safety hazards caused by hydrogen peroxide decomposition.

In the fixed-bed hydrogenation reactor, the catalyst remains stationary, and the working solution and hydrogen pass through the catalyst bed from top to bottom, with the hydrogenated solution flowing out from the bottom of the bed. The filter effectively intercepts a small amount of broken catalyst downstream.

The filtration process in the hydrogen peroxide production process involves various forms of solid-liquid separation, gas-solid/gas-liquid separation, and liquid-liquid separation. Common methods include conventional bag filters (more commonly used in older equipment), cartridge filters, and aggregation separation.

 

Feature-Tec Coalescence-separation Technology and Products

• Aromatic Hydrocarbon Removal from Oxidation Tail Gas (Secondary Separation Tank): Effectively removes aromatics carried in the oxidation tail gas, reduces the pressure on activated carbon or carbon fiber adsorption devices, meets environmental requirements, and recovers aromatics, thereby reducing production and operating costs.

• Hydrogen Removal from Water: Whether a coalescer is installed depends on the presence of water in the hydrogen gas.

• Water Removal from Extract Solution: Effectively separates water from the extract solution

• Hydrogen Peroxide Purification and Removal of Total Organic Carbon (TOC): Effectively separates TOC from hydrogen peroxide to improve its quality.

 

 

Feature-Tec's Electronic Grade Hydrogen Peroxide Filtration Solution

Industrial-grade hydrogen peroxide, after further purification, yields electronic-grade hydrogen peroxide. This product is suitable for various filtration applications in the semiconductor industry. It can be used as a cleaning agent, etchant, and photoresist remover for semiconductor silicon wafers. Additionally, it can be employed in the production of advanced insulation layers, removal of inorganic impurities from electroplating solutions, treatment of copper, copper alloys, gallium, and germanium in the electronics industry, as well as etching and cleaning of solar silicon wafers.

 

Electronic-grade hydrogen peroxide belongs to wet electronic chemicals, with high technical barriers. If its purity fails to meet standards, it will not only lead to defects in semiconductor products, significantly impacting product performance and yield, but also contaminate process equipment. Higher-grade wet electronic chemicals require purity levels even reaching parts per trillion (ppt).

 

 

Feature-Tec utilizes its core technology in filtration and separation to achieve efficient purification and separation of wet electronic chemicals online, effectively reducing the impact of filling, storage, and transportation on their purity, thereby lowering the defect rate of the final products and enhancing production efficiency.

 

Dynamic Membrane Separation Technology by Feature-Tec

 

 

MIGHTY All-Fluorine High-Efficiency Intercept Filter Cartridge

• Advanced all-fluorine structure, excellent chemical compatibility

• Extremely low leachables level, suitable for critical wet electronic chemical filtration and purification

• Unique folding technology ensures high interception efficiency, ensuring high throughput and low resistance of the filter cartridge, extending its service life

 

LIBRA All-Fluorine Hydrophilic PTFE Filter Cartridge

• Hydrophilic all-fluorine filter cartridge, excellent chemical compatibility

• Extremely low leachables level, suitable for critical wet electronic chemical filtration and purification

• Modified PTFE filter membrane eliminates the need for pre-wetting, saving startup time and reducing operating costs

• Specifically designed for purifying electronic chemicals used in wafer cleaning, such as critical water-based cleaning agents SC-1, SC-2, and SPM, etc.

 

 

 

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