Semiconductor
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Process Gas Purifier FTKLN B
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The FTKLN series gas purifiers are developed to meet point-of-use (POU) requirements, with the
B-series specifically designed to ensure purity consistency and final purity of high-purity process
gases in the microelectronics industry. Through scientifically optimized material formulations,
the purifier deeply removes impurities such as moisture, oxygen, carbon monoxide, and carbon
dioxide, ensuring gas purity at the point of use.
Typical Application
- Semiconductor industry
- Cylinder gas purification
- Chromatographic carrier gas purification
- Other fields
Product Features
- Process Control: Purity control below ppb levels; purifiers manufactured under ISO9001:2015 standards and CE Pressure Equipment Directive (PED) certification.
- Ease of Operation and Installation: No need for heaters or other power-consuming devices; operates at room temperature. Vertical installation is recommended, with gas flow direction from top to bottom.
- Cost Savings: Shell life of 20 years. Can operate for one year with inlet gas water and oxygen content at 1 ppm. Can be returned for regeneration after adsorption saturation.
Product Parameters
Typical Applications
Related components
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Message consultation
Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai
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