FPD

Filter Cartridge HUPF

  • The HUPF filter features a compact design and is made from ultra-pure PFA, providing outstanding mechanical properties and superior chemical resistance. Free of any metal components, it is specifically designed for the filtration of wet electronic chemicals such as strong acids and bases in microelectronics and semiconductor manufacturing processes.

     

    Product Feature

    • Compact design, low installation space requirements

    • Low liquid storage, low material waste

    • No metal components

    • Wide range of chemical compatibility

    • Locking ring secures cartridge

    • Extremely low metal ion precipitation

    • Cleaned and packaged in a clean room

     

    Typical Application

    • Strong acid, strong alkali filtration

    • High temperature filtration

    • Etching solution, cleaning solution filtration

     

    Technical Parameters

    Materials of Construction:

    • Head: PFA

    • Housing: PFA

    • Plug: PFA

    • Locking Collar: PVDF

    • Nut: PVDF

     

    Operating Conditions:

    • Maximum Operating Pressure:

      • 3 bar @ 100°C

      • 7.6 bar @ 25°C

    • Maximum Operating Temperature: 100°C

     

    Installation & Interface:

    • Inlet/Outlet Port Sizes: 3/4", 1"

    • Vent/Drain Port Sizes: 1/4", 1/2"

    • Connection Type: Flaretek, Beaded

    • Cartridge End: 222

Filter Cartridge HUPF
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  • Filter Cartridge HUPF

Product Parameters

Typical Applications

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