FPD
High Purity Gas Filter Cartridge FG22
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FG22 High Purity Gas Filter is specially designed for the ultra-purification of electronic-grade gas, and the filtration accuracy can reach 1.5nm. FG22 Filter features a compact structure and high mechanical strength, demonstrating excellent compatibility with all categories of semiconductor process gases, inert and reactive gases.
Product Features
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316L electronic grade hardware
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High throughput and low pressure drop
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Excellent chemical compatibility
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Suitable for high temperature and high pressure environment
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100% integrity tested
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100% helium leak tested
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Manufactured in a dust-free environment
Technical Parameter
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Shell: Low sulfur SS 316L
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Membrane: PTFE
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O-ring: FFKM
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Cage and End cap: PFA, PP
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Membrane Area: PFA: >230cm²; PP: >400cm²
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Max. operating pressure: 52 bar@80°C(Optional 207 Bar @25°C)
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Max. Operating D.P.: Forward: 7 bar@21°C; Reverse: 3.4 bar@21°C
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Max. Operating Temperature: PP: 80°C; PFA: 180°C
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Flow rate: 0~600slpm
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Particle shedding: Particle release: <1 particle/ft³@>0.01μm; Volatiles: <10 ppb moisture
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Product Parameters
Typical Applications
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Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai