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High pure gas filter GasTM
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Top-installed filters are ideal for integrated gas delivery systems. They are easy to access and replace.
Product Features
• Miniaturized design, compact structure, space saving
• High temperature and pressure capability
• Excellent gas displacement and desorption characteristics
• Advanced S316L stainless steel media
• 100% helium leak tested
• Electropolished S316L stainless steel housing
Parameter
- Membrance: SS 316L powder sintered filter
- Housing: Low sulfur 316L SS Ultra pure 316L (VAR/VIM+VAR)
- Surface Treatment: Outer surface: Turning surface, Ra<1.6μm; Inner surface: Electropolishing, Ra<0.2μm
- Filtration Rating: ≥1.5nm
- Filtration Efficiency: ≥99.9999999% (9 LRV)@120slpm (MPPS)
- Helium Leak Test: Qualified: 1×10⁻¹¹ atm.cc/sec; Tested: 1×10⁹ atm.cc/sec
Performance
- Max. inlet pressure: 0.98Map@25℃
- Max. operating D.P.: 0.69Mpa@25℃
- Max. operating temperature: 460℃
- Flow rate: 0~120slpm
- Downstream cleanliness: Particle release: <1 particle/ft³ @>0.01μm; Volatiles: <10 ppb moisture
Product Parameters
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Maximum inlet pressure:207 Bar@23℃
Maximum differential pressure:
Forward: 4 bar (60 psid) @ 23°C (73 °F)
反向: 0.07 MPa (0.7 bar, 10 psid) @ 23°C (73℉)
Maximum operating temperature:120 ℃ (248 ℉)
Gas flow rate:
Recommended working flow rate: 0-60slpm
Typical Applications
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Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai