Photochemical Filter Cartridge FPLF

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The FPLF series photochemical filters feature a triangular port configuration, allowing quick assembly and disassembly with piping connectors. They are suitable for deionized water, developer solutions, photoresists, and other photochemical reagents, offering a wide range of applications.

Product Features
- Chemical Compatibility: Compatible with developers, photoresists, and other photochemical reagents
- Low Elution: Controls the low elution of metal ions, organic substances, and non-volatile residues
- Ultra-clean Process: Enhanced cleaning technology reduces particle shedding and microbubble formation
- Flexible Adaptation: Multiple membrane materials (UPE, Nylon, PTFE) and retention accuracies (3 nm to 200 nm) available
Technical Parameters
- Membrane Options: UPE, Nylon, PTFE
- Cage and End Cap Material: PP
- Support and Water Distribution Layer Material: PP
- O-rings Material: FFKM
- Maximum Operation Temperature: 40°C
- Maximum Operating Pressure: 3.4 bar @ 25°C
- Maximum Forward Flow Differential Pressure: 2.7 bar @ 25°C
- Effective Filtration Area: 800 cm² - 3200 cm²
Typical Application
- Photoresist
- Developer
- Solvents

Product Parameters

Typical Applications

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