Photochemical Filter Cartridge FPLE

Brochure Download

The FPLE series photochemical filters feature an inline port configuration, allowing quick assembly and disassembly with piping connectors. They are suitable for deionized water, developer solutions, photoresists, and other photochemical reagents, offering a wide range of applications.

Product Features
- Chemical Compatibility: Suitable for developers, photoresists, and other photochemical reagents.
- Low Elution: Controls the low elution of metal ions, organic substances, and non-volatile residues.
- Ultra-Clean Process: Enhanced cleaning technology reduces particle shedding and microbubble formation.
- Flexible Adaptation: Multiple membrane materials (UPE, Nylon, PTFE) and retention accuracies (3 nm to 200 nm) are available.
Technical Parameters
- Membrane Options: UPE, Nylon, PTFE
- Cage and End Cap Material: HDPE
- Support and Water Distribution Layer Material: HDPE
- O-rings Material: FFKM
- Maximum Operation Temperature: 40°C
- Maximum Operating Pressure: 3.4 bar @ 25°C
- Maximum Forward Flow Differential Pressure: 2.7 bar @ 25°C
- Effective Filtration Area: 3000 cm² - 3200 cm²
Typical Application
- Photoresist
- Developer
- Solvents

Product Parameters

Typical Applications

Related components

Related Equipment

Home page

Message consultation

COOKIES

Our website uses cookies and similar technologies to personalize the advertising shown to you and to help you get the best experience on our website. For more information, see our Privacy & Cookie Policy

COOKIES

required

These cookies are necessary for basic functions such as payment. Standard cookies cannot be turned off and do not store any of your information.

analyze

These cookies collect information, such as how many people are using our site or which pages are popular, to help us improve the customer experience. Turning these cookies off will mean we can't collect information to improve your experience.

Feature

These cookies enable the website to provide enhanced functionality and personalization. They may be set by us or by third-party providers whose services we have added to our pages. If you do not allow these cookies, some or all of these services may not function properly.

advertise

These cookies help us understand what you are interested in so that we can show you relevant advertising on other websites. Turning these cookies off will mean we are unable to show you any personalized advertising.