FPD
High Purity Gas Filter Cartridge FG30
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FG30 in-line ultra-pure gas filter is specially designed for high-flow electronic grade gas, and filtration accuracy can reach 1.5nm. GIST MEGA filter features a compact structure and high mechanical strength, demonstrating excellent compatibility with all categories of semiconductor process gases.
Product Features
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316L electronic grade hardware
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High throughput and low pressure drop
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Excellent chemical compatibility
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Suitable for high temperature and high pressure environment
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100% integrity tested
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100% helium leak tested
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Manufactured in a dust-free environment
Technical Parameters
Materials of Construction:
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Membrane: PTFE
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Cage: PP
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O-ring: EPDM
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Shell:
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Solution I: LS (Low Sulfur) 316L
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Solution II: SS 316L (VAR/VIM+VAR)
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Surface Treatment:
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Outer surface: Ra < 1.6 μm
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Inner surface: Ra < 0.6 μm
Operating Conditions & Performance:
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Maximum Forward Flow Differential Pressure: 4.1 bar @ 23°C
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Maximum Reverse Flow Differential Pressure: 0.7 bar @ 23°C
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Maximum Operation Temperature: 60°C
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Flow Rate:
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N model: 0 - 1500 slpm
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L model: 0 - 3000 slpm
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Filtration Specifications:
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Filtration Rating: ≥ 1.5 nm
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Filtration Efficiency: ≥ 99.9999999% (9 LRV) @ 300 slpm (MPPS, all particles)
Testing & Qualification:
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Helium Leak Test:
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Qualified: 2 × 10⁻¹⁰ atm·cc/sec
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Tested: 1 × 10⁻⁹ atm·cc/sec
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Technical Parameter
- Membrance：PTFE
- Cage：PP
- O-ring：EPDM
- Shell：Solution I: LS 316L；Solution II: SS 316L(VAR/VIM+VAR)
- Surface Treatment：Outer surface: Ra<1.6μm；Inner surface: Ra<0.6μm
- Filtration Rating：≥1.5nm
- Filtration Efficiency：≥99.999999%(9 LRV)@300 slpm (MPPS, all particles)
- Helium Leak Test：Qualified: 2 × 10⁻¹⁰ atm·cc/sec；Tested: 1 × 10⁻⁹ atm·cc/sec
- Max. forward flow D.P.：4.1 bar @ 23℃
- Max. reverse flow D.P.：0.7bar@23℃
- Max. Operation Temperature：60℃
- Flow rate：N model: 0~1500slpm；L model: 0~3000slpm
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Product Parameters
Typical Applications
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Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai