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Filtration & Separation Solutions

Embrace Ultimate Application Challenges of Filtration, Separation, and Purification Technology

Semiconductor Wastewater Treatment

Integrated circuits on semiconductor chips are created through oxidation, etching, expansion and various other methods to create a series of circuit diodes, transistors and other electronic components, completing a particular functional logic (AND, OR, NAND, etc) to achieve a required circuit function. Semiconductor production has high process requirements, encompassing lithography, precision cutting, grinding and other complex processes. These production processes produces large amounts of waste water with various types of pollutants such as complex chemicals, heavy metals, organic pollutants, silicon and fluorine traces. Semiconductor process cooling water (PCW) applications would require filtration of the PCW before reusing (see water treatment applications).

Cleaning Process for Various Wastewater Sources

Application	Cleaning Medium	Equipment	Cleaning Effect
Photolytic Stripping	Oxygenated Plasma	Plate Reactor	Removes adhesives
Polymer Removal	H₂SO₄: H₂O = 6:1	Mixing Tank	Removes organic compounds
Natural Oxide Removal	HF : H₂O < 1:50	Mixing Tank	Creates anaerobic system
Rotary Drying	N₂Gas	Dryer	Does not produce residues
RCA-1 (Alkaline)	NH₄OH : H₂O₂: H₂O = 1: 1: 1.5	Mixing Tank	Removes surface particles
RCA-2 ( Alkaline)	HCl: H₂O₂: H₂O = 1: 1: 5	Mixing Tank	Removes heavy metals
DI Cleaning	Deionized Water	Mixing Tank	Removes cleaning solvents

Problem Description：

• Large Amount of Wastewater Generation

• Complex Composition of Wastewater， The wastewater contains various transition metals such as silicon, germanium, etc., along with a high fluoride content.

• High Concentration of Difficult-to-Treat COD in Wastewater，The wastewater contains a high concentration of COD (Chemical Oxygen Demand), which is difficult to treat.

Application of the Product:

• Ceramic Membrane Filtration System

• Small footprint, centralized management, intelligent control.

• High water quality production, simultaneously removes phosphates and COD from wastewater.

• Excellent resistance to chemical acids and alkalis, long lifespan, easy maintenance.

• Simplifies traditional processes, no need for additive chemicals.

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