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Gasfil sintub series ultrapure gas filter adopt all 316L stainless steel structure,，filtration rating can reach 1.5 nm. It is specially designed for the in-line filtration application of ultra-high-purity gas insemiconductor manufacturing process with metal construction of various models and with 0 to 250 L/min flow rates. It's the ideal filtration solution of high-temperature, dynamic, high-pressure applications.
Gasfaver series diffusers are designed for rapid venting of vacuum cavities in semiconductor manufacturing processes. Gasfil diffusers' filtering accuracy is up to 1.5 nm by combining the gas flow characteristics of the diffusers and the particle interception characteristics of an efficient filter. With this unique structure design, it ensures filtration efficiency while avoiding causing turbulence, It affects the process chamber environment and prevents blowing up particles or even blowing up silicon wafers.
Flow restrictors are installed in compressed gas supply lines and gas distribution manifolds to prevent unexpectedly high gas flows caused by gas line ruptures, valve failures and pressure regulator failures
EL cartridge is made of high-purity PP resin and cleaned by ultra-pure water to effectively control the problem of ion leaching. At the same time, the polypropylene material itself has a wide range of chemical compatibility and can be used in most acid-base & alkaline-base solutions.
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Email: marketing@feature-tec.com
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