Uzbekistan High purity porous metal restrictor Flores

Flow restrictors are installed in compressed gas supply lines and gas distribution manifolds to prevent unexpectedly high gas flows caused by gas line ruptures, valve failures and pressure regulator failures

Product Description

Flow limiting devices are typically installed in compressed gas supply pipelines and gas

distribution manifolds to prevent accidental high gas flow caused by gas pipeline rupture, valve

failure, or pressure regulator malfunction.

In extreme situations, they ensure the safety of semiconductor personnel, maintain equipment

stability, and reduce product loss.

Compared to traditional single-orifice flow restrictors, the sintered metal powder core features a

porous structure, ensuring smooth laminar flow even at high flow rates.

The unique porous structure also avoids the wear and tear associated with single-orifice flow

restrictors, reducing the need for frequent recalibration, minimizing blockage from small

particles, and extending service life.

 

 

Product Features‌

  • Compact structure, easy installation
  • Standardized VCR fitting design, suitable for pipeline installation
  • Fully 316L construction, compatible with various process gases
  • High structural strength, suitable for high-pressure gas applications
  • Unique porous structure for more stable gas laminar flow
  • Less affected by particles, lower wear impact, longer service life
  • 100% Helium leak detection test
  • 100% calibrated flow curve before delivery
  • Stable structure, no bonding, no particle shedding
  • Produced in a Class 100 cleanroom, high cleanliness, ready to use

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Technical Parameters‌

  • ‌Membrance‌: 316L SS powder sintered filte
  • ‌Housing‌: Low sulfur 316L SS
  • ‌Flow rate‌: 0.1sccm~40slpm
  • ‌Max. inlet pressure‌: 1500psig
  • ‌Filtration accuracy‌: ±7.5% Base
  • ‌Repeatability‌: ±0.1%
  • ‌Max. operating temp.‌: 460℃
  • ‌Helium Leak Test‌: 1x10⁹atm.cc/sec。
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