FPD
High Purity Gas Filter Cartridge FG10 / 15
-
FG10/15 ultra-pure gas filter is specially designed for electronic-grade gas, and filtration accuracy can reach 1.5nm. GIST mini filter features a compact structure and high mechanical strength, demonstrating excellent compatibility with all categories of semiconductor process gases.
Product Features
- 316L electronic grade hardware
- High throughput and low pressure drop
- Excellent chemical compatibility
- Suitable for high temperature and high pressure environment
- 100% integrity tested
- 100% helium leak tested
- Manufactured in a dust-free environment
Typical Application
- PVD, CVD
- Etching, Ion implantation and other process gas filtration
Technical Parameter
- Membrance: PTFE
- Cage and End cap: PFA
- O-ring: FFKM
- Shell: Solution I: Low sulfur SS316L; Solution II: SS 316L(VAR/VIM+VAR)
- Surface Treatment: Outer surface: Ra<1.6μm; Inner surface: Ra<0.2μm
- Filtration Rating: ≥1.5nm
- Filtration Efficiency: ≥99.9999999%(9 LRV)@30 slpm
- Helium Leak Test: Qualified: 2×10⁻¹⁰ atm·cc/sec; Tested: 1×10⁻⁹ atm·cc/sec
- Max. inlet pressure: 207bar@23°C
- Max. Forward D.P.: 4bar@23°C
- Max. Reverse D.P.: 0.7bar@23°C
- Max. operating Temp.: 120°C
- Flow rate: 1.0~120 slpm, 1.5~300 slpm
- Particle shedding: <1 particle/ft³@>0.1μm
- Volatiles: <10 ppb moisture
Product Parameters
Typical Applications
Related components
Related Equipment
Message consultation
Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai