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Uzbekistan High-temp ultrapure gas Filter Gasfil Sintub
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Product Description
Gasfil sintub series ultrapure gas filter adopt all 316L stainless steel structure,，filtration rating can reach 1.5 nm. It is specially designed for the in-line filtration application of ultra-high-purity gas insemiconductor manufacturing process with metal construction of various models and with 0 to 250 L/min flow rates. It's the ideal filtration solution of high-temperature, dynamic, high-pressure applications.
Product Features
• All 316L stainless steel construction
• Ultra-high particle interception efficiency, high flux, low resistance
• Suitable for high temperature applications
• Compact construction
• Suitable for a wide range of process gases
• Manufactured, tested and packaged in a clean room environment
• 100% integrity test passed
• 100% helium leakage test passed
Technical Parameter
- Membrance: SS 316L powder sintered filter、Sintered Nickel Powder
- Housing: Low sulfur 316L SS Ultra pure 316L(VAR/VIM+VAR)
- Surface Treatment: Outer surface: Ra<1.6um; Inner surface: Electropolishing, Ra<0.2um
- Filtration Rating: ≥1.5nm
- Filtration Efficiency: ≥99.9999999%(9 LRV)@30 slpm
- Max. inlet pressure: 207 bar
- Max. operating D.P.: 5.2 bar
- Max. operating temp.: inert gas: 460℃; Corrosive gas, reactive gas: 550℃
Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai