Slovakia High pure gas filter GasTM

Top-installed filters are ideal for integrated gas delivery systems. They are easy to access and replace.

Product Description

Top-installed filters are ideal for integrated gas delivery systems. They are easy to access and replace.

 

Product Features

•  Miniaturized design, compact structure, space saving

•  High temperature and pressure capability

•  Excellent gas displacement and desorption characteristics

•  Advanced S316L stainless steel media

•  100% helium leak tested

•  Electropolished S316L stainless steel housing

 

Parameter

  • ‌Membrance‌: SS 316L powder sintered filter
  • ‌Housing‌: Low sulfur 316L SS Ultra pure 316L (VAR/VIM+VAR)
  • ‌Surface Treatment‌: Outer surface: Turning surface, Ra<1.6μm; Inner surface: Electropolishing, Ra<0.2μm
  • ‌Filtration Rating‌: ≥1.5nm
  • ‌Filtration Efficiency‌: ≥99.9999999% (9 LRV)@120slpm (MPPS)
  • ‌Helium Leak Test‌: Qualified: 1×10⁻¹¹ atm.cc/sec; Tested: 1×10⁹ atm.cc/sec

 

Performance

  • ‌Max. inlet pressure‌: 0.98Map@25℃
  • ‌Max. operating D.P.‌: 0.69Mpa@25℃
  • ‌Max. operating temperature‌: 460℃
  • ‌Flow rate‌: 0~120slpm
  • ‌Downstream cleanliness‌: Particle release: <1 particle/ft³ @>0.01μm; Volatiles: <10 ppb moisture
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