PRODUCTS CENTER
Palau Photochemical Filter Polyflora E/F
Category:
Product Description
Polyflora E series photochemical filters feature a straight-type interface arrangement, while the F series features a triangular interface arrangement. Both types can be quickly assembled and disassembled with pipe fittings, suitable for deionized water, developer, photoresist, and other photochemical reagents, offering a wide range of applications.
Product Features
• Chemical compatibility: Developers, photoresists, and other photochemical reagents
• Low elution: Control of low elution of metal ions, organic substances, and non-volatile residues
• Ultra-clean process: Enhanced cleaning technology reduces particle shedding and microbubble formation
• Flexible adaptation: Multiple membrane materials (UPE, Nylon, PTFE) and retention accuracies (3 nm to 200 nm) available
Typical Application
• EUV, ArF, KrF photoresist
• Developer
• Solvents
Technical Parameter
- Membrane: UPE、Nylon、PTFE
- Cage and End cap: HDPE
- Stand and water distribution layer: HDPE
- O-rings: FFKM
- Max. Operation Temperature: 40℃
- Max. Operating Pressure: 3.4bar@25℃
- Max. forward flow D.P.: 2.7bar@25℃
- Effective filtration area: 800 cm²-3200 cm²
Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai