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Palau Integrated Perfluorinated Filter VIGOROSO
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Product Description
The PTFE filtration solution is specially designed for advanced Wet Etch Cleaning (WEC) processes. It ensures excellent cleanliness while effectively removing particles from various acids, bases, and other process chemicals, featuring broad chemical compatibility and high throughput.
Product Features
• Multiple area options, high flow rate, long service life
• Excellent chemical compatibility
• 100% integrity tested
• High filtration efficiency, effectively removes particles from wet chemicals
• Additive-free welding, utilizing perfluorinated material thermal bonding technology
• Pre-wetted filters, enabling quick start in water-based chemicals
• Manufactured in a cleanroom environment
• High initial cleanliness, low particle shedding, and reduced metal ion leaching
Typical Application
• Semiconductor wet etch and cleaning
• High-purity chemical production, filling, and transportation
Technical Parameter
- Shell: PFA
- Membrane: PTFE、Modified PTFE
- Cage and End cap: PFA
- Stand and water distribution layer: PFA
- Max. Operation Temperature: 180℃
- Max. forward flow D.P.: 4.4bar@25℃(63.8psid@77℉)、0.5bar@180℃(7.2psid@356℉)
- Max. reverse flow D.P.: 3.4bar@25℃(49.3psid@25℉)
Contact
Hotline: (+86)400-820-6150
Email: marketing@feature-tec.com
Address: 8/F, Block A, Building 3, Tianhua Information Technology Park, 299 Longcao Road, Xuhui District, Shanghai