Filtration & Separation Solutions

Embrace Ultimate Application Challenges of Filtration, Separation, and Purification Technology

Semiconductor Wastewater Treatment

 

Integrated circuits on semiconductor chips are created through oxidation, etching, expansion and various other methods to create a series of circuit diodes, transistors and other electronic components, completing a particular functional logic (AND, OR, NAND, etc) to achieve a required circuit function. Semiconductor production has high process requirements, encompassing lithography, precision cutting, grinding and other complex processes. These production processes produces large amounts of waste water with various types of pollutants such as complex chemicals, heavy metals, organic pollutants, silicon and fluorine traces. Semiconductor process cooling water (PCW) applications would require filtration of the PCW before reusing (see water treatment applications).

 

Cleaning Process for Various Wastewater Sources

 Application

 Cleaning Medium

 Equipment

 Cleaning Effect

 Photolytic Stripping

 Oxygenated Plasma

 Plate Reactor

 Removes adhesives

 Polymer Removal

 HSO: HO = 6:1

 Mixing Tank

 Removes organic compounds

 Natural Oxide  Removal

 HF : HO < 1:50

 Mixing Tank

 Creates anaerobic system

 Rotary Drying

 NGas

 Dryer

 Does not produce residues

 RCA-1 (Alkaline)

 NHOH : HO: HO

 = 1: 1: 1.5

 Mixing Tank

 Removes surface particles

 RCA-2 ( Alkaline)

 HCl: HO: HO

 = 1: 1: 5

 Mixing Tank

 Removes heavy metals

 DI Cleaning

 Deionized Water

 Mixing Tank

 Removes cleaning solvents

 

Problem Description:

• Large Amount of Wastewater Generation

• Complex Composition of Wastewater, The wastewater contains various transition metals such as silicon, germanium, etc., along with a high fluoride content.

• High Concentration of Difficult-to-Treat COD in Wastewater,The wastewater contains a high concentration of COD (Chemical Oxygen Demand), which is difficult to treat.

 

Application of the Product:

• Ceramic Membrane Filtration System

• Small footprint, centralized management, intelligent control.

• High water quality production, simultaneously removes phosphates and COD from wastewater.

• Excellent resistance to chemical acids and alkalis, long lifespan, easy maintenance.

• Simplifies traditional processes, no need for additive chemicals.

 

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